tag:blogger.com,1999:blog-86848960672497359502024-03-12T20:49:10.811-07:00MOCVD@SDSMTHi, my name is Sini. I am dangerous, but I am safe to work with if you follow all my rules.MOCVD@SDSMThttp://www.blogger.com/profile/10954316346454744141noreply@blogger.comBlogger25125tag:blogger.com,1999:blog-8684896067249735950.post-79285542156197098952019-10-24T09:15:00.001-07:002019-10-24T09:15:26.235-07:0010/24/19 - Disconnected TMIn bubbler (X-36273). Made new tubing connecting TMIn bubbler #1 (X-36273) and TMIn bubbler #2 (S-21123-246) in series. Also installed a manual valve between INPV3 and the connecting line from TMIn#1 outlet and TMIn#2 inlet, which enables us to flush out the lines. Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-69939276413938219412019-09-27T09:30:00.002-07:002019-09-27T09:30:20.071-07:009/27/19 - Replaced old TMIn bubbler (S-21123) with new TMIn bubbler (X-36273). Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-66060004638622724492019-09-18T17:04:00.003-07:002019-09-18T17:04:32.528-07:009/18/19 - Removed vent line from manifold, cleaned TMIn run/vent valve. Swapped As-liquid and TMIn run/vent valves and re-attached vent line. Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-16420782982091996182019-08-22T13:16:00.001-07:002019-08-22T13:16:34.510-07:008/22/19 - Installed new t-butyl-phosphide (PL) bubbler. Set temperature to 17°C.Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-71926480802510096672019-08-09T16:22:00.002-07:002019-08-12T10:45:57.301-07:008/9/19 - New PH3 cylinder installed, pressure 500 psi, set line pressure to 20 psi.<br />
<br />
8/9/19 - New AsH3 cylinder installed, pressure 220 psi, set line pressure to 20 psi.<br />
<br />
8/8/19 - Replaced motor on oil purifier. Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-8537505586257628942019-03-15T13:22:00.004-07:002019-03-15T13:22:54.094-07:003/15/19 - Disconnected old charcoal scrubber and connected new Jupiter Scientific scrubber. Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-76665156305557824542019-03-01T09:31:00.004-08:002019-03-01T09:31:44.586-08:003/1/2019 - Changed K-40 fitting that connects to rotary drive to a modified fitting with N<span style="font-size: xx-small;">2</span> flush. Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-1796102805675416542019-02-14T14:07:00.000-08:002019-02-14T14:07:15.119-08:002/14/19 - Changed charcoal in scrubber after aggressive cleaning of inlet line on scrubber.Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-73407592826783171192018-11-07T16:40:00.003-08:002018-11-07T16:40:57.849-08:0011/07/2018 - Removed TMGa bubbler (P-2292-21) and connected TMGa bubbler (1000005536) which weighs 1530.5g. Also weighed TMAl (M5900) at 1569.1g and TMIn (S-21123) at 1937.7g.Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-79981774257651896162018-11-01T14:24:00.002-07:002018-11-01T14:24:09.976-07:0011/01/2018 - Installed new rotary feed through. Using 4 clamps to secure feed though to KF adapter. Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-76171194406340854472018-09-07T16:09:00.003-07:002018-09-07T16:09:31.075-07:009/7/18 - PH3 cylinder was replaced for new one. New pressure reads ~550 psiAnonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-24167102666623721042018-08-17T13:07:00.002-07:002018-08-17T13:07:57.915-07:008/17/18 - Vacuum Pump was reattached to MOCVD system after getting it back from being fixed. It was filled with fresh oil. Filters for the purifier were replaced with new ones several weeks earlier. Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-9720917190651671552018-04-26T08:11:00.000-07:002018-04-26T08:11:11.289-07:004/25/18<br />
<br />
-Flushed TMAl, TMIn, Se, AsH3, and PH3 lines with H2 a minimum of 5 times each.<br />
<br />
4/26/18<br />
- Baked manifold overnight for about 19hrs at 68°C.Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-56411558368244151372018-04-19T08:51:00.000-07:002018-04-19T08:51:00.978-07:004/19/18<br />
<br />
Baked manifold over night for ~17hrs with 50 sccm N2 at ~68°CAnonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-3058581861515236902017-10-12T10:37:00.000-07:002017-10-12T10:37:21.911-07:0010/9/17<br />
- Aluminum plug was made and placed in sight glass hole of oil trap.<br />
<br />
10/10/17<br />
- Aluminum plug was push out of oil trap by built up pressure.<br />
- Clamp was used to secure Al plug in place while emptying H2 lines.<br />
<br />
10/11/17<br />
- Ran air through oil trap and scrubber. Measured a 40psi pressure build up that would slowly decrease when air supply was stopped.<br />
- Removed scrubber, emptied charcoal and measured ~3psi pressure build up while pushing air through the empty scrubber.<br />
- Cleaned inside of scrubber with IPA and let dry overnight.<br />
<br />
10/12/17<br />
- Filled scrubber with new charcoal and measured ~10psi pressure build up when pushing air through it. <br />
- Reconnected scrubber and oil trap still have clamp on oil trap plug, since we could not remove it. However, oil trap was pressurized to ~70psi and the Al plug did not move. Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-43714748513157321572017-10-03T10:06:00.001-07:002017-10-03T10:06:30.654-07:0010/2/17<br />
- Modified oil trap so both large and small filters can be used in it.<br />
- Changed oil trap filter, using a larger one than normal.Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-8418375067760489762017-09-29T11:45:00.002-07:002017-09-29T11:45:35.528-07:009/28/17<br />
- Small leak detected at the sight glass on the oil trap. Broke spanner while trying to reposition it. Fixed sight glass in place with wire and super glue.<br />
<br />
9/29/17<br />
- Still picking up a small leak from the sight glass of the oil trap. Covered it with vacuum epoxy.Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-17276823785063358412017-09-28T12:53:00.001-07:002017-09-28T12:53:24.608-07:009/25/17<br />
- Changed oil purifier filters and pump oil.<br />
<br />
9/26/17<br />
- Drained oil from pump and opened and cleaned oil tray and sight glass in the pump. Refilled with new oil and ran vacuum pump and oil purifier the remainder of the day, TGM was reading less than 5 ppb till around 8pm at which point it dropped to 0 ppb. Pump and purifier were shut off at 9pm.<br />
<br />
9/27/17<br />
-Tried a growth and alarm went off at "fill lines" step. Let pump cabinet air out then used hand sensor to test for leaks while running H2. Hand sensor picked up on a leak near the pump cap, which also triggered the hand sensor without any H2 flowing through the system. Left TGM tape around multiple points on the pump over night and the tape around the pump cap became discolored.<br />
<br />
9/28/17<br />
- Changed the O-ring on the pump cap as well as wrapped the cap threads with Teflon to create a better seal between the cap and pump. Hand sensor didn't pick anything up so H2 and AsH3 were flushed through the system for 10min with no reading on the TGM.<br />
<br />
- Tape was also changed on the TGM.Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-58816787353597704932017-09-22T12:48:00.000-07:002017-09-22T12:48:17.672-07:009/22/17<br />
<br />
TGM alarm maxed out first in pump enclosure then in both pump and reactor enclosures, with minimum readings at the scrubber outlet and system enclosure.<br />
<br />
Found a crack pipe clamp on the vacuum line going to the pump. Replaced this connecting pipe clamp.<br />
<br />
Replaced the pump oil.Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-53793845253683449442017-06-21T13:53:00.002-07:002017-06-21T13:53:21.397-07:00AsH3 cylinder was replaced. <br />
Lot # 1987306991Q7 SV020731<br />
Net Weight: 1.98 lbs or 898.11 g<br />
<br />
Old cylinder is being stored in back of MOCVD enclosure.Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-40407482217196144832017-05-10T09:40:00.000-07:002017-05-10T09:40:39.998-07:004-20-2017<br />
<br />
Charcoal in scrubber was changed. This was done to help prevent readings at the scrubber outlet when using PH3.<br />
<br />
5-5-2017<br />
<br />
A finer grade of charcoal was added to the charcoal in the scrubber.Anonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-79368366398580942102017-05-10T09:38:00.002-07:002017-05-10T09:38:23.330-07:005-10-2017<br />
<br />
TGM pump stopped working during the night. A fastener screw was sheared off and I was unable to adjust the flow at any of the points. All points were reading low flow. The pump was replaced with a new one, which is working fine. - NSAnonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-31341475018149858802016-12-02T16:03:00.002-08:002016-12-02T16:04:24.169-08:0012/02/16: Attached Selenium (Se) bubbler. -NSAnonymousnoreply@blogger.com0tag:blogger.com,1999:blog-8684896067249735950.post-54134844729590784662016-07-26T17:41:00.001-07:002016-07-26T17:41:11.302-07:00MOCVD maintenance work: 8-27-2015 ~ 7-7-2016<b><br /></b>
<b>Historical records</b><br />
<b><br /></b>
<b>8-27-2015 ~ 7-7-2016</b><br />
<b><br /></b>
<b>Please refer to the original MOCVD System log book for more details.</b><br />
--------------------------------------------------------------------------------------------------------------------------<br />
<br />
-----------------------------<br />
8-31-2015 ~ 9-1-2015<br />
Deep cleaning of the vacuum pump and the oil trap:<br />
clean the inside chamber that holds the pump oil;<br />
clean the inside wall of the oil trap;<br />
change vacuum pump oil;<br />
change dust filter of the vacuum pump;<br />
change to a new mist filter for the oil trap.<br />
- NZ<br />
<br />
-----------------------------<br />
9-11-2015<br />
Noticed that H2O sensors don't work<br />
- PA<br />
<br />
-----------------------------<br />
9-25-2015<br />
When brought the H2 out of idling, H2 purifier temperature went up to as high as 435 degC, at the cell evacuation step.<br />
<br />
Reason: H2 flow rate=390 sccm and bleed valve was all the way open, thus H2 was evacuated at a very high rate. Bad for the cell.<br />
<br />
Solution: Keep the bleed valve at 5 sccm bleeding rate until H2 flow rate reading (of the H2 MFC on the MOCVD panel) starts to drop from setting or stays at its minimum.<br />
- NZ<br />
<br />
-----------------------------<br />
9-27-2015<br />
Maybe a leak around AsGPV11.<br />
H2 line never fully evacuates when As on/ purge/ H2 flush on.<br />
Also As flow never drips below ~0.22 sccm.<br />
<br />
Leak somewhere in H2 line on AsH3/ N-dope side.<br />
- PA<br />
<br />
-----------------------------<br />
10-1-2015<br />
Trouble with solenoid valves (previous day) (air leak). Removed part of segment 2 ( cable #52).<br />
<br />
- PA<br />
<br />
-----------------------------<br />
10-4-2015<br />
Changed pump oil, replace oil purifier filters.<br />
<br />
Evacuated AsH3 line back to AGMV1;<br />
Evacuated PH3 line back to PGMV1;<br />
Evacuated TMAl line (twice, filled with N2, evacuated.)<br />
Evacuated TMIn line (twice, filled with N2, evacuated.)<br />
Need to refill lines before use.<br />
- PA<br />
<br />
-----------------------------<br />
10-5-2015<br />
Re-tuned heater.<br />
- NS<br />
<br />
-----------------------------<br />
10-9-2015<br />
Evacuated As and P lines.<br />
Found/ Fixed wire going to 53: PGSV1.<br />
- NS<br />
<br />
-----------------------------<br />
10-12-2015<br />
Purging AsH3 line;<br />
Set off TGM through high- pressure side. Not sure why.<br />
Pump/Reactor/Scrubber cabinets.<br />
- PA<br />
<br />
-----------------------------<br />
10-15-2015<br />
AGMFC1 was removed and we opened it, and unfortunately, the sensor part of the MFC was made of micro-wired connecting to the electronic circuit and easy to break, thus we broke the micro-wireds and would try to fix it.<br />
<br />
Label: AGMFC1<br />
Make: MKS<br />
Serial #: 021766633<br />
Model #: M100B01311CS1BV<br />
Range: 0~10 sccm<br />
<br />
Put an old MFC on to replace AGMFC1<br />
Range: 0~10sccm<br />
Make: Vacuum General- Ultra-Flo<br />
Serial #: 515810588<br />
Model #: UC2-11S01<br />
<br />
Dismount the H2 monitor from the wall, and connect it to a voltmeter. Test it with a small H2 flow and read the voltmeter.<br />
Baseline: in air, min reading=0.85 volt.<br />
When detects H2, reading increases, may go up to 20 volt or more.<br />
- NZ<br />
<br />
-----------------------------<br />
10-16-2015<br />
Check connections around the replaced MFC and manifold for leaks by filling the lines with H2.<br />
<br />
Filled and evacuated the arsine and phosphine line for several times with H2 back to the AGMV1 and PGMV1.<br />
-NS<br />
<br />
-----------------------------<br />
10-19-2015<br />
Filled both arsine and phosphine lines with their respective source gas. Set regulator to 20 psi on both.<br />
Put new chem. sensitive paper near the cylinders. Let both lines run for ~25 min.<br />
- NS<br />
<br />
-----------------------------<br />
10-19-2015<br />
Ran arsine line at different values to test how responsive and steady the MFC is.<br />
<br />
Flow Steadiness<br />
(sccm) <br />
2 Good, no fluctuation<br />
4 Good, no fluctuation<br />
6 Good, no fluctuation<br />
8 Good, no fluctuation<br />
10 Good, no fluctuation<br />
- NS<br />
-----------------------------<br />
10-20-2015<br />
Created a Mo cover/holder to go on top of the susceptor.<br />
- NS<br />
<br />
-----------------------------<br />
10-21-2015<br />
Baked susceptor with Mo for ~20 min at 750 degC.<br />
Mo became tinted brown in color.<br />
<br />
Cleaned CARBOLITE furnace.<br />
- NS<br />
<br />
-----------------------------<br />
11-8-2015<br />
Reset TGM counter, need to change tape in the next few days.<br />
- PA<br />
<br />
-----------------------------<br />
11-11-2015<br />
Change TGM tape.<br />
- PA<br />
<br />
-----------------------------<br />
12-14-2015<br />
Flushed TMIn lines to weigh the bubbler.<br />
TMIn bubbler was disconnected and placed in a container.<br />
- NS<br />
<br />
-----------------------------<br />
12-16-2015<br />
1939.7 g solution TMIn, S21123<br />
Initial mass was 1944.6 g<br />
- PA<br />
<br />
-----------------------------<br />
12-16-2015<br />
Reattached and flushed TMIn source.<br />
- NS<br />
<br />
-----------------------------<br />
12-21-2015<br />
Brought H2 purifier out of idle, set H2 manifold to 300 and noticed purifier went to 425 degC.<br />
- NS<br />
<br />
-----------------------------<br />
12-22-2015<br />
New susceptor came in. 20 in total.<br />
All 20 are individually wrapped and in a container labeled "New susceptor".<br />
<br />
-----------------------------<br />
1-13-2016<br />
Deposition on reactor walls reached higher than usual.<br />
- NS<br />
<br />
-----------------------------<br />
1-15-2016<br />
Bleed valve will not fully close, and the bleed knob just keeps spinning clock-wise.<br />
- NS<br />
<br />
-----------------------------<br />
1-21-2016<br />
Fully opened and cleaned the reactor chamber.<br />
Removed and cleaned bellows, thermal couple and rod.<br />
Put everything back together and raised rod height to 6cm.<br />
- NS<br />
<br />
-----------------------------<br />
1-25-2016<br />
TMGa bubbler<br />
1583.6 g P2292-21<br />
- PA<br />
<br />
-----------------------------<br />
2-3-2016<br />
H2 purifier got to 422 degC, bleed flow wasn't correct.<br />
- NS<br />
<br />
-----------------------------<br />
2-10-2016<br />
Replace N2 cylinder. New cylinder is at 2550 psi.<br />
- NS<br />
<br />
-----------------------------<br />
2-15-2016<br />
Replaced MOCVD susceptor rod.<br />
-NS<br />
<br />
-----------------------------<br />
2-16-2016<br />
Remove bellows.<br />
KF40 adapters on chamber and rotary drive feed-through.<br />
- PA<br />
<br />
-----------------------------<br />
2-17-2016<br />
HP3 bleed valve is leaking.<br />
Valve was replaced.<br />
- NS and PA<br />
<br />
-----------------------------<br />
2-18-2016<br />
HP3 leaked again. Replaced and greased.<br />
HMV5 adjusted.<br />
HP3 valve leaks when turned and closed all the way.<br />
- PA<br />
<br />
-----------------------------<br />
2-22-2016<br />
Flushed In line back to the bubbler for 10 times.<br />
- NS<br />
<br />
-----------------------------<br />
2-23-2016<br />
Flush TMIn for 20 times.<br />
- PA<br />
<br />
-----------------------------<br />
2-24-2016<br />
Flushing TMIn line for 5 times.<br />
- PA<br />
<br />
-----------------------------<br />
2-24-2016<br />
Added ball-bearing to thermal couple.<br />
- NS<br />
<br />
-----------------------------<br />
2-24-2016<br />
After growth, flushed TMIn for 5 times.<br />
- NS<br />
<br />
-----------------------------<br />
2-25-2016<br />
Changed back to flexible tubing to connect chamber.<br />
- NS<br />
<br />
-----------------------------<br />
2-26-2016<br />
After growth, flushed TMIn line for 5 times.<br />
- NS<br />
<br />
-----------------------------<br />
2-29-2016<br />
Change reactor o-ring.<br />
- PA<br />
<br />
-----------------------------<br />
2-29-2016<br />
After growth, flushed TMIn line for 5 times.<br />
- NS<br />
<br />
-----------------------------<br />
3-1-2016<br />
There were two gaskets on inlet line to reactor, removed, leak rate improved.<br />
- PA<br />
<br />
-----------------------------<br />
3-2-2016<br />
Leak rate is poor with flexible inlet.<br />
Switch ed back to rigid inlet. Vacuum good.<br />
- PA<br />
<br />
-----------------------------<br />
3-3-2016<br />
Adjusted thermo-couple location to hopefully improve reading.<br />
- NS<br />
<br />
-----------------------------<br />
3-4-2016<br />
Chamber pressure ~342 Torr in the morning.<br />
- PA<br />
<br />
-----------------------------<br />
3-4-2016<br />
After growth, flush the TMIn line for 5 times using key.<br />
- NS<br />
<br />
-----------------------------<br />
3-7-2016<br />
Full purge of TMIn bubbler line with H2 for 8 times.<br />
- PA<br />
<br />
-----------------------------<br />
3-7-2016<br />
After growth, flushed TMIn line for 5 times.<br />
- NS<br />
<br />
After another growth, flushed TMIn bubbler line ~10 times.<br />
- NS<br />
<br />
-----------------------------<br />
3-8-2016<br />
Changed TMIn bath to 10 degC.<br />
Changed PR2 to 10 psig (was ~18 psig).<br />
- PA<br />
<br />
<br />
-----------------------------<br />
3-9-2016<br />
Reset TGM tape counter to 120 days without changing the tape (4 days left).<br />
- PA<br />
<br />
-----------------------------<br />
3-11-2016<br />
Removed ALMFC1<br />
MKS<br />
S/N 021810488<br />
0~100 sccm<br />
<br />
Installed new (used) ALMFC1<br />
Ultra-Flo<br />
S/N 515760588<br />
0~100 sccm<br />
<br />
ALMFC1 unable to control flow at high flow setting (100 sccm) when switching pressure on.<br />
- PA<br />
<br />
-----------------------------<br />
3-11-2016<br />
Flushed Al lines 20 times with N2/ H2.<br />
- NS<br />
<br />
-----------------------------<br />
3-14-2016<br />
Test vacuum by plugging inlet and exhaust lines seems there is a very small leak somewhere in or around the manifold.<br />
- NS<br />
<br />
-----------------------------<br />
3-15-2016<br />
Flushed AsH3 line back to cylinder 5 times;<br />
Flushed TMIn line back to bubbler 10 times;<br />
Flushed Al line back to bubbler 10 times;<br />
Flushed PH3 line back to cylinder 5 times.<br />
<br />
Reactor cabinet alarm went off during first cycle.<br />
Flush TMGa line back to bubbler 5 times.<br />
- NS<br />
<div>
<br /></div>
<div>
-----------------------------<br />
3-16-2016<br />
Flushed Zn line back to bubbler 10 times.<br />
<br />
Removed manifold from the MOCVD system.<br />
Made sure vacuum chamber was fully sealed to watch if there is a leak.<br />
<br />
Dismantled the manifold labeled each valve with its matching number (1~10) which is engraved on the manifold itself.<br />
<br />
Cleaned the manifold and valves with toothpicks, IPA and 3 um diamond polish.<br />
<br />
Re-connected the valves to the manifold.<br />
Valve #3 and #6 were switched since the #3 valve is till not very clean looking and the #6 valve is not really used because it was for liquid As.<br />
- NS<br />
<br />
-----------------------------<br />
3-22-2016<br />
Continued cleaning and vacuum checking manifold.<br />
- NS<br />
<br />
-----------------------------<br />
3-23-2016<br />
Re-attached vent line and put the manifold back into the MOCVD system.<br />
Plugged the Fe, As liquid, P liquid lines, replaced pneumatic valves with new ones on the ALPV4 and INPV4. Also removed ALMFC1 S/N 515760588, and install ALMFC1 S/N 021810488.<br />
- NS<br />
<br />
-----------------------------<br />
3-24-2016<br />
Baked manifold at 53 degC for ~5.5 hours.<br />
- NS<br />
<br />
-----------------------------<br />
3-25-2016<br />
Switched ALMFC1, S/N 021810488 out and put in ALMFC1, S/N 515730588;<br />
Put ALMFC1 S/N 021810488 back in due to a potential vacuum problem with 515730588.<br />
Tape in the TGM was changed.<br />
- NS<br />
<br />
-----------------------------<br />
3-28-2016<br />
Flushed PH3 line 5 times;<br />
Flushed TMGa line 5 times;<br />
Flushed AsH3 line 5 times;<br />
Flushed TMIn line 5 times.<br />
- NS<br />
<br />
-----------------------------<br />
3-29-2016<br />
Filled PH3 line with PH3;<br />
Filled AsH3 line with AsH3;<br />
Filled TMGa line and TMIn line.<br />
- NS<br />
<br />
-----------------------------<br />
3-28-2016<br />
Alarm went off when opening reactor chamber after growth 160329b. Vacuum was not turned off.<br />
- NS<br />
<br />
-----------------------------<br />
3-30-2016<br />
Baked manifold over night for ~15 hours at ~58 degC.<br />
- NS<br />
<br />
-----------------------------<br />
4-3-2016<br />
Exchanged run-vent connectors<br />
1 <---> 6 front<br />
2 <---> 7<br />
3 <---> 8<br />
4 <--->9<br />
5 <---> 10 (0) back<br />
need to relabel valves.<br />
- PA<br />
<br />
-----------------------------<br />
4-6-2016<br />
Noticed vacuum doesn't hold over night.<br />
Test vacuum by plugging run and valve lines in different combinations. Loosened vent-to-manifold connections for lines 6 and 7 and re-tightened them.<br />
- NS<br />
<br />
-----------------------------<br />
4-7-2016<br />
Changed TMIn/ TMAl bubbler temp. to 25 degC.<br />
- PA<br />
<br />
-----------------------------<br />
4-9-2016<br />
High-temp fault on heater.<br />
restarted, and it appeared again.<br />
May need to increase water flow through heating coil.<br />
- PA<br />
<br />
-----------------------------<br />
4-10-2016<br />
Flushed out H2O lines to power supply heat station, tied lines to fan and pump cabinet.<br />
- PA<br />
<br />
-----------------------------<br />
4-10-2016<br />
Shaft seems to have shrunk n diameter.<br />
Susceptors are slipping, bore diam too big for shaft. is shaft decomposing on samples?<br />
- PA<br />
<br />
-----------------------------<br />
4-12-2016<br />
Replaced front H2 cylinder. New cylinder pressure ~2300 psig.<br />
- NS<br />
<br />
-----------------------------<br />
4-20-2016<br />
Steel mesh rolled inside baffle (coffee filter) ~300 um<br />
- PA<br />
<br />
-----------------------------<br />
4-20-2016<br />
Flushed TMIn line 5 times.<br />
- NS<br />
<br />
-----------------------------<br />
4-20-2016<br />
Test gas flow in reactor chamber with mineral oil smoke.<br />
- NS<br />
<br />
-----------------------------<br />
4-20-2016<br />
Changed N2 cylinder. New pressure is 2600 psig.<br />
- NS<br />
<br />
-----------------------------<br />
4-23-2016<br />
303 Torr<br />
Cleared out UltraTorr connector.<br />
- PA<br />
<br />
-----------------------------<br />
4-28-2016<br />
Baked out manifold over night.<br />
- PA<br />
<br />
-----------------------------<br />
4-29-2016<br />
Flushed AsH3 line back to cylinder 5 times;<br />
Flushed PH3 line back to cylinder 5 times;<br />
Flushed In and Ga lines back to bubbler 5 times.<br />
Removed manifold.<br />
- NS<br />
<br />
-----------------------------<br />
5-3-2016<br />
Manifold was put back in and put under vacuum.<br />
- NS<br />
<br />
-----------------------------<br />
5-4-2016<br />
Tested vacuum with everything hooked up.<br />
Leak rate was ~0.02 Torr/min.<br />
- NS<br />
<br />
-----------------------------<br />
5-5-2016<br />
Baked manifold over night. Got to ~60 degC.<br />
- NS<br />
<br />
-----------------------------<br />
5-5-2016<br />
TMIn bubbler temp. changed to 17 degC.<br />
- NS<br />
<br />
-----------------------------<br />
5-6-2016<br />
37 Torr<br />
- PA<br />
<br />
-----------------------------<br />
5-7-2016<br />
641 Torr<br />
Changed pump oil;<br />
Changed oil purifier filters.<br />
- PA<br />
<br />
-----------------------------<br />
5-8-2016<br />
120 Torr<br />
- PA<br />
<br />
-----------------------------<br />
5-10-2016<br />
New N2 cylinder. ~2300 psig.<br />
- NS<br />
<br />
-----------------------------<br />
5-11-2016<br />
702 Torr<br />
- PA<br />
<br />
-----------------------------<br />
5-11-2016<br />
Cleaned oven with metal polish.<br />
- NS<br />
<br />
-----------------------------<br />
5-12-2016<br />
701 Torr<br />
- PA<br />
<br />
-----------------------------<br />
5-12-2016<br />
Switched to non-flexible tube.<br />
- NS<br />
<br />
-----------------------------<br />
5-13-2016<br />
350 Torr<br />
- PA<br />
<br />
Replaced front H2 cylinder. New cylinder ~2400 psig.<br />
- NS<br />
<br />
-----------------------------<br />
5-16-2016<br />
Baked out run line.<br />
Flushed sources.<br />
baking with Al, Ga, In, P, As sources running (purged).<br />
<br />
Replaced TMAl MFC<br />
UC2-21S01, S/N 515760588<br />
- PA<br />
<br />
-----------------------------<br />
5-17-2016<br />
Evacuated Al, Ga, In, P, As lines 5 times, filled with H2.<br />
- NS<br />
<br />
-----------------------------<br />
5-17-2016<br />
Run As and Ga lines with sources open for ~30 min.<br />
- NS<br />
<br />
-----------------------------<br />
5-18-2016<br />
Alarm went off when trying to pump down,after idling process.<br />
- NS<br />
<br />
-----------------------------<br />
5-19-2016<br />
576.5 Torr<br />
-PA<br />
<br />
Smoothed out the fitting on the run line that is in the wall of the MOCVD system.<br />
- NS<br />
<br />
-----------------------------<br />
5-27-2016<br />
Replaced front H2 cylinder. ~2400 psig.<br />
- NS<br />
<br />
-----------------------------<br />
6-1-2016<br />
Changed N2 cylinder. New pressure 2600 psig.<br />
- NS<br />
<br />
-----------------------------<br />
6-2-2016<br />
11.95 Torr<br />
- PA<br />
<br />
<br />
-----------------------------<br />
6-4-2016<br />
42.7 Torr<br />
- PA<br />
<br />
Installed new inlet tube with 1/4 inch UltraTorr on manifold end.<br />
- PA<br />
<br />
-----------------------------<br />
6-5-2016<br />
12.7 Torr<br />
- PA<br />
<br />
-----------------------------<br />
6-8-2016<br />
12.2 Torr<br />
- PA<br />
<br />
Re-calibrated TMAl MFC S/N 515160588 ,Ultra-Flo.<br />
- PA<br />
<br />
-----------------------------<br />
6-9-2016<br />
11.8 Torr<br />
- PA<br />
<br />
-----------------------------<br />
6-10-2016<br />
Vented and reinstalled MFC.<br />
- PA<br />
<br />
15.6 Torr<br />
Changed to 1/16 inch thermo-couple.<br />
- PA<br />
<br />
Flushing TMAl line ~12 times.<br />
- PA<br />
<br />
Received new PH3 cylinder.<br />
- PA<br />
<br />
-----------------------------<br />
6-11-2016<br />
Replaced gasket on TMAl MFC.<br />
- PA<br />
<br />
-----------------------------<br />
6-13-2016<br />
Flushed Al line ~15 times.<br />
- NS<br />
<br />
-----------------------------<br />
6-14-2016<br />
Tightened connections on Al line.<br />
- NS<br />
<br />
-----------------------------<br />
6-14-2016<br />
Flushed Al line 15 times, finished with N2 carrier gas.<br />
Loosened/ tightened connection between MFC and PV.<br />
Flushed and filled TMAl line with H2 ~5 times.<br />
- NS<br />
<br />
-----------------------------<br />
6-16-2016<br />
15.9 Torr<br />
- PA<br />
<br />
-----------------------------<br />
6-17-2016<br />
Alarm went off while starting idle procedure.<br />
- NS<br />
<br />
-----------------------------<br />
6-22-2016<br />
15.9 Torr<br />
- PA<br />
<br />
-----------------------------<br />
6-23-2016<br />
17.8 Torr<br />
- PA<br />
<br />
-----------------------------<br />
6-23-2016<br />
11:12 pm<br />
The TGM started to alarm and the TGM read 5 ppb at point #4 system enclosure.<br />
After ~5 seconds, it read 4.9 ppb and the alarm stopped. The reading stayed at 4.9 ppb for ~3.5 min and then read "0".<br />
- NZ<br />
<br />
-----------------------------<br />
6-24-2016<br />
12.4 Torr<br />
- PA<br />
<br />
-----------------------------<br />
6-27-2016<br />
Changed front H2 cylinder, new pressure ~2300 psig.<br />
- NS<br />
<br />
-----------------------------<br />
6-28-2016<br />
Purged TMGa line 3 times, noticed it seemed stable.<br />
- NS<br />
<br />
-----------------------------<br />
6-29-2016<br />
11.8 Torr<br />
- PA<br />
<br />
<br />
-----------------------------<br />
7-3-2016<br />
10.8 Torr<br />
- PA<br />
<br />
-----------------------------<br />
7-5-2016<br />
9.9 Torr<br />
- PA<br />
<br />
-----------------------------<br />
7-6-2016<br />
11.5 Torr<br />
- PA<br />
<br />
Changed N2 cylinder. New pressure ~2400 psig.<br />
- NS<br />
<br />
-----------------------------<br />
7-7-2016<br />
11.4 Torr<br />
- PA<br />
<br /></div>
<br />
<br />
<div>
<br /></div>
MOCVD@SDSMThttp://www.blogger.com/profile/10954316346454744141noreply@blogger.com2tag:blogger.com,1999:blog-8684896067249735950.post-52279441374525256132016-03-11T15:52:00.003-08:002016-07-26T13:43:56.983-07:00Maintenance work of the MOCVDHistorical records will be updated.<br />
<div>
<br /></div>
<div>
<b>For new records, please comment with <u>name</u>, <u>date</u>, <u>item</u> and <u>reasons</u>. Thanks!</b><br />
<b><br /></b>
- March-11-2016<br />
<br /></div>
MOCVD@SDSMThttp://www.blogger.com/profile/10954316346454744141noreply@blogger.com5