Friday, September 22, 2017


TGM alarm maxed out first in pump enclosure then in both pump and reactor enclosures, with minimum readings at the scrubber outlet and system enclosure.

Found a crack pipe clamp on the vacuum line going to the pump.  Replaced this connecting pipe clamp.

Replaced the pump oil.

Wednesday, June 21, 2017

AsH3 cylinder was replaced. 
     Lot # 1987306991Q7  SV020731
     Net Weight: 1.98 lbs or 898.11 g

Old cylinder is being stored in back of MOCVD enclosure.

Wednesday, May 10, 2017


Charcoal in scrubber was changed.  This was done to help prevent readings at the scrubber outlet when using PH3.


A finer grade of charcoal was added to the charcoal in the scrubber.

TGM pump stopped working during the night.  A fastener screw was sheared off and I was unable to adjust the flow at any of the points.  All points were reading low flow.  The pump was replaced with a new one, which is working fine. - NS